Introduction to semiconductor material and device physics. Quantum mechanics and band theory of semiconductors. Charge carrier distributions, generation/recombination, transport properties. Physical and electrical properties and fabrication of semiconductor devices such as MOSFETs, bipolar transistors, laser diodes and LED's.

Techniques used in modern integrated circuit fabrication, including diffusion, oxidation, ion implantation, lithography, evaporation, sputtering, chemical-vapor deposition, and etching. Process integration. Process evaluation and final device testing. Extensive laboratory exercises utilizing fabrication methods to build electronic devices. Use of computer simulation tools for predicting processing outcomes. Recent advances in processing CMOS ICs and micro-electro-mechanical systems.

Fundamentals of design, selection, and operation of components of measuring systems. Measurement processes, data acquisition systems, analysis of data, and propagation of measurement uncertainty.

Biosensors are analytical devicesincorporating biomaterials with a physicochemical transducer or transducing microsystem, which may be optical, electrochemical, thermometric, piezoelectric, magnetic or micromechanical. The course provides a detailed understanding of underlying engineering principles used to detect small molecules, DNA, proteins, and cells in the context of applications in diagnostic testing, pharmaceutical research, and environmental monitoring. Students will learn the design, selection, and operation of various sensors and transducers and learn how to interpret biosensor outputs.

LIOS sponsors a senior design project for EE major students enrolled in EE491/492. Meanwhile, LIOS also offers research intern positsions to undergraduate students. Prospective students are encouraged to meet with Dr. Lu to determine a project in field of integrated biosensing systems. Projects include (i) Measurement and testing of photonic devices for detection of proteins and DNA, etc., (ii) Development of lab on chip platforms for point of care applications, and (iii) Development of cell/biomolecule binding assays and sensor surface functionalization. Students are paired with a graduate student as their mentor to setup experiment and solve problems that come up in the lab.